| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate |
2009-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d72f6e5b6065dc26db38dc76c47fedf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9b1dac1f53b463abbaf8ebb93c14488
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f43e404d350a573565691d74b04e6599
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f72308b1532ad07ce9974fbe9ae9cfba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1ff0d401c183a99a2dc01a6167a4668 |
| publicationDate |
2014-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I463569-B |
| titleOfInvention |
Method of fabricating a semiconductor component |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107104051-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107104051-B |
| priorityDate |
2009-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |