| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2010-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3495e6ca6d993da0346b85d32333b736
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1f1d782325eaa022c4953f27c85b67d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05523ebc7a6bee11ca601ba6dfcacd67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcd6631066eb36d5c173dae3ac1f831f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5260fbfad470287947ad23aee9ef7221 |
| publicationDate |
2014-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I463554-B |
| titleOfInvention |
CMP method |
| priorityDate |
2009-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |