| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_366802749d278c1447279515ff2967f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B44C1-227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-12 |
| filingDate |
2012-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddd8693bf305a73cbe1b3c31fffacd6f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76b21354e33026b1175b63fdc591809d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d72d0ed3ef803c84a8c3fcf005fd9f76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fdf25b225f8abc621aaf819f865b037 |
| publicationDate |
2014-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I462173-B |
| titleOfInvention |
Substrate processing method and substrate processing device |
| priorityDate |
2011-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |