| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-30469 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J31-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J29-86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate |
2009-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29e7ba3729dc27cf4aaf4d7afd1974a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0f4ca707a149b02c1cf479631b2210f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93a21d514e9557fbb66a9ceffc6458bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_343e2b0b453e4d80a7cb1db1b5ffed04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95584cd6911ac67831d2b1266d8222da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1edde01111679ef025c6b71e47fd5d7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bdc0e10c543ef3e60e0a118364487fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50fe737ace905461592f2ec1c05f6815 |
| publicationDate |
2014-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I461562-B |
| titleOfInvention |
Method for forming a titanium-containing layer on a substrate using an ALD method |
| priorityDate |
2008-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |