| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8005a9911d8bb19d7a8de16bb43f260a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2010-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb3dda305047861705712d1fd3514fc1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25807b200b5651439da710429e4ed5dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4705dba4cd87e9798109541c8b56b346
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ac09d4e9e2dc5176d899562ebb5f330 |
| publicationDate |
2014-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I459500-B |
| titleOfInvention |
Electrostatic chuck and method of manufacturing same |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I728977-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646216-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I642139-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I798868-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11769683-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11476146-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I774205-B |
| priorityDate |
2009-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |