| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_366802749d278c1447279515ff2967f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6704
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67751
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2012-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5b6514b305a6b691d08448aa742f127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a12b2f0d72fac0d68c36eab3ac607a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aca3e7f5f0b2d2a7eb45b8671ada608d |
| publicationDate |
2014-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I458035-B |
| titleOfInvention |
Substrate processing apparatus and substrate processing method |
| priorityDate |
2012-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |