| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be1462ebb0cffd1cbec02760046ed36a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_000e2b4b4468f107c25e72c767d27597 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02363 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2007-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11f9178d540a2a9b9923229338d4ac85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e83cec0abe0b6e7b709a899f37f4d11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d16b0682658f5476277a43dfdef7b719 |
| publicationDate |
2014-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I445073-B |
| titleOfInvention |
Method for manufacturing semiconductor substrate, semiconductor substrate for solar energy, and etching solution |
| priorityDate |
2006-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |