| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2009-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12a8dc53697a9aa533b75f401ecb5452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5117df5323734ea44e6f5d31d94aca51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0418e559d6a5023e9e40b674f008ab7e |
| publicationDate |
2014-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I441919-B |
| titleOfInvention |
Cleaning solution for semiconductor device and cleaning method |
| priorityDate |
2008-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |