| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-378
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-26 |
| filingDate |
2010-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_815eecbd95c27371f74fa181d4076e5d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_046a1d5630b5d89ffb11f8bd4878115a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0aa9a1ebd83c1ef19f5ee1177d90f1aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a91a712f05772e0c82260323c5a7b5c0 |
| publicationDate |
2014-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I441918-B |
| titleOfInvention |
Post-CMP cleaning formula and method |
| priorityDate |
2009-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |