Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
filingDate |
2009-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2014-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c633fbac8e82f01a241d2d66facd674 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cb76a48a8fd308153f862449d1f0fed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74269cefd1302c083f912f9be1e99325 |
publicationDate |
2014-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-I437654-B |
titleOfInvention |
Film forming apparatus, substrate processing apparatus, and film forming method |
priorityDate |
2008-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |