| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81cfb88d909c75104c0c8d61799a72b0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1472 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-00 |
| filingDate |
2006-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a641dbc22027d05f7bae12bcf4800f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d39c1a08bd25203a76c3466d8d5b6571
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca50265b0cecfd56ea5f35ce58e9dcc1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94d500307e4cbf37a855dd2848722c3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_911e638bc0a31aba058d4489fd36b638
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdcbc4a3d0f4c67dbdb1552d0d381650 |
| publicationDate |
2014-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I434957-B |
| titleOfInvention |
Integrated chemical mechanical polishing composition and method for veneer process |
| priorityDate |
2005-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |