| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8bd959e1752e4b22eb8f111a967c59af |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32339 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-28 |
| filingDate |
2012-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef8e2a6c4aec06dbf97443b2cbfe1825
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd2c4b3b5d35945f85ec7e952d539214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce6414c4c19949a7d149f5392bdbac36 |
| publicationDate |
2014-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I433948-B |
| titleOfInvention |
A radio frequency plasma assisted pulsed laser deposition system and a method for preparing a thin film from its system |
| priorityDate |
2012-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |