Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-10 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-007 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12 |
filingDate |
2009-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2014-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de18c97b114b1d78198934f0aeb582e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e0305729cc4c00007faf3964fd849b2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45b290f4a4f9992196dcae7d2bfb343c |
publicationDate |
2014-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-I430382-B |
titleOfInvention |
Surface treatment device and surface treatment method |
priorityDate |
2008-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |