Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c85d78c6a4459b5dbbc49c82a4c5c107 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F24-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D317-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D317-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D307-93 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate |
2011-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2014-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b84827c658573a73be016e1b8a6cc573 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_127659a310d85481b192d291ae31e813 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4f56b69a8650644f3a496da866f587e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_659b0093db45b772a8d8d2d17849ae52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e4f3d6ea917ac7e0c5ec60320698d77 |
publicationDate |
2014-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-I428356-B |
titleOfInvention |
Monomer, polymer, photoresist composition and method for forming photolithography |
priorityDate |
2010-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |