| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc905cbef116a1ec61d12125af9427f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45574
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45578
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-30 |
| filingDate |
2010-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1107d97dd732c2a99e6192755f12d572
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3904c4d05eb694146065df1914648da8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a9c862deff16554a4c39c2c66fa8c57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c359acdb1b00295d98de158f144362a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d2402dd4fc6b07153909bb4347d287c |
| publicationDate |
2014-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I427183-B |
| titleOfInvention |
Plasma processing device |
| priorityDate |
2010-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |