| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b62a061db267544224c10495ee0cd640 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1811
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F18-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2006-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16f062126cd3ff57b3153b39a686c8f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae22987e3426a706b9a2dc615e923a55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_025011f0ff0cf4442dff6f406e6b4599
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db1ef11c955332b8c1424e20f637bae0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce6b80de5c16fb370c9c10490752733e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d83fb359afd8945a1ee8e0be6ae48fb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f654bce234af5829ebede572c95f50c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_924e79ea0dcfc1731adf58e594803b86 |
| publicationDate |
2014-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I426348-B |
| titleOfInvention |
Semiconductor lithography process copolymer manufacturing method |
| priorityDate |
2005-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |