| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4283a2f8ade5dc582d75300427a38e50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
| filingDate |
2007-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_721b5d7c835908fb45e8e27ac17c5ab2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f72da74886f755243fffad7993ef714
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67eb178dfa5d836c858f561ff6c89684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b368f074080dfd188bcd42d46419172 |
| publicationDate |
2014-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I421937-B |
| titleOfInvention |
Etching solution composition |
| priorityDate |
2006-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |