| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1543b2b19ec0e331a0dcd89888cbef5f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-06 |
| filingDate |
2006-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9259fe5ccf6542bbf5a26e7de4e20b35 |
| publicationDate |
2014-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I421317-B |
| titleOfInvention |
Polishing solution and chemical mechanical polishing (CMP) method |
| priorityDate |
2005-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |