| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1807 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1811
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F216-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F228-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F226-02 |
| filingDate |
2006-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cbd0d62579b4d4cb604b0bad0e96233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9d3153646e12097cc722fa97f091a2a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_962132911cf911e4cb5af4b286a88959
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30a39e540e419bb09c6cc76ad65e7dc9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab814f09c2fa1ff54e325def971b4d4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a1fe9ead439503816b839fc3b440b1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f73a270ddcc3792b1bff4740b69cbe1f |
| publicationDate |
2013-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I418942-B |
| titleOfInvention |
Formation method of upper layer film forming composition and photoresist pattern |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9422445-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9223217-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9223209-B2 |
| priorityDate |
2005-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |