http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I415865-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33c922e05f6133b7d72dbb849d77487d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-32 |
| filingDate | 2010-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3232d9aa9e9d46607b5f9febc0492472 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ca8383425b1fe77487ce198d4da2f74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_406991ee9ccbd38302baaea6d2657341 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08458f6042b97c31f46c7444d339481d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d89c92b6af65de1ec8b4f8d519aef391 |
| publicationDate | 2013-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I415865-B |
| titleOfInvention | Acrylate resin, photoresist composition comprising the same, and photoresist pattern |
| abstract | Disclosed are an acrylate resin included in a chemically amplified photoresist composition for forming a thick film, a chemically amplified photoresist composition including the same, and a photoresist pattern fabricated therefrom. The photoresist composition including the acrylate resin can achieve an improvement of sensitivity without damaging major characteristics such as compatibility (dispersion stability), spreading characteristics, developing characteristics, and resolution. In addition, a thick resist pattern can be formed with such a composition, and the pattern can have excellent sensitivity, developing characteristics, pattern characteristics, crack resistance, and plating resistance. |
| priorityDate | 2010-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 203.