Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-568 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
filingDate |
2004-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2013-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f276d519ba89eed523a468701f069b6c |
publicationDate |
2013-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-I409349-B |
titleOfInvention |
Manufacturing device |
abstract |
The present invention provides a vapor deposition method and a vapor deposition apparatus as one of manufacturing apparatus that promotes an efficiency of utilizing an EL material to reduce a manufacturing cost and is excellent in uniformity or throughput of forming an EL layer. In a deposition chamber, according to the present invention, an evaporation source holder to which a container encapsulating an evaporation material is set is moved (or shuttled) at a constant speed only in one direction (Z direction) with respect to the substrate. The substrate is transported in a direction (X direction) orthogonal to the movement direction of the evaporation source holder (Z direction) at regular intervals. |
priorityDate |
2003-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |