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publicationDate 2013-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I408482-B
titleOfInvention Wavelength conversion optical element, manufacturing method of wavelength conversion optical element, wavelength conversion device, ultraviolet laser irradiation device and laser processing device
abstract An optical wavelength conversion element includes a cesium-lithium-borate crystal processed into a 10-mm long optical element cut in an orientation that allows a fourth harmonic of a Nd:YAG laser to be generated. A transmittance (Ta) at 3589 cm&minus;1 in an infrared transmission spectrum of the optical element is used as an index that indicates a content of water impurities in the crystal and is independent of a polarization direction. An actual measurement of the transmittance Ta is at least 1%, without taking into account loss at an optically polished surface of the crystal. A wavelength conversion device, a ultraviolet laser irradiation apparatus, a laser processing system, and a method of manufacturing an optical wavelength conversion element are also described.
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