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filingDate 2009-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2013-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I408251-B
titleOfInvention Method for removing carbon from organic phthalate materials
abstract Described herein is a method for removing at least a portion of the carbon-containing species within an organosilicate (OSG) film by treating the OSG film with a chemical, such as but not limited to an oxidizer, exposing the OSG film to an energy source comprising ultraviolet light, or treating the OSG film with a chemical and exposing the OSG film to an energy source.
priorityDate 2008-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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