http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I405040-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0606c8e113c860d8a6c41e2aaaf3120d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate | 2010-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e46350ad9c3f69e2e046e84d5ee84ee http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5b78e7f686d2090034a7bf4fe91afc1 |
| publicationDate | 2013-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I405040-B |
| titleOfInvention | A positive-type photosensitive resin composition, and a method of forming a pattern |
| abstract | The present invention relates to a positive-type photosensitive resin composition and a pattern forming method thereof. Particularly the invention provides the positive-type photosensitive resin composition and a method for forming the pattern with high dry-resisting etching performance by the composition. The resin composition comprises the following components: (A) novolac resin; (B) ester of o-naphthaquinone dioxa sulfonic acid; (C) melamine series compound; (D) epoxy silane compound and (E) disslovent, wherein, the novolac resin (A) comprises high-ortho novolac resin (A-1). The number of linked methylenes of the high-ortho novolac resin (A-1) on ortho-ortho is 18-25% of that of the linked methylenes of the high-ortho novolac resin (A-1). |
| priorityDate | 2010-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 320.