| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33dafb5bbc2ec47ebcb7becbbe60f704 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2375-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2101-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-6674
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-664
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-4854
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-4238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L101-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-0895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L75-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 |
| filingDate |
2006-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ffb1b26ef132509b7975ab3d298afb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d69d4bb1ef41516c78d965f909c850d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6ffc0c870d6f86a0bfc04a26b8127e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87af56d0194c16246206e2076e638799 |
| publicationDate |
2013-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I403387-B |
| titleOfInvention |
Polymer material, foam obtained therefrom, and polishing pad using the same |
| abstract |
The subject is to provide a polymer material which enables to improve planarity and planarization efficiency of a polished surface and is useful as a polishing pad which generates only a few scratches. The said subject is solved by a polymer material having a tensile modulus at 50°C after saturation swelling with 50°C water of 130 to 800 MPa, a loss tangent at 50°C of not more than 0.2, and a contact angle with water of not more than 80°. |
| priorityDate |
2005-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |