| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2d825814c2847d297de844b4e7c60de4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2259-818
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-2066 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34 |
| filingDate |
2008-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d949d6b2aef954f329fd52af446e1ff5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c782eae5afa446c57dd533e748b36233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c934710c63246b9a2161a867308c4a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fcdb1fcb734ffcb0d24a3ce5065f552
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_406c5f90f2b36f4acbca613aaf400f22 |
| publicationDate |
2013-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I401114-B |
| titleOfInvention |
Plasma decomposition processor |
| priorityDate |
2008-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |