| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68792
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6838 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2009-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b326dd2055e42a3c8e8d3aaa23ee6d14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a3cc961a4fd0b08e2990202f18ceb8c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6693fc246013f30af207fa5c8aab6f2a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3732589a57c248cc22f68e9c939e0be0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c455b31e5f6b02b7efe2d2b8ff9cb07b |
| publicationDate |
2013-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I399826-B |
| titleOfInvention |
Apparatus and method for supporting, positioning, and rotating a substrate within a processing chamber |
| priorityDate |
2008-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |