| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-12 |
| filingDate |
2008-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75db9c3c91fa6f255912f9b040ed1940
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5022c0529c0a436a067add7256c5d70d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9c21604f3cf80557528d4769697a1a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9da225554df0144657bbe981e528c192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45b924182d17d8a7c7b211c3829068b4 |
| publicationDate |
2013-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I397612-B |
| titleOfInvention |
Wet cleaning process for returning anodized chamber components |
| priorityDate |
2007-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |