| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81cfb88d909c75104c0c8d61799a72b0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate |
2006-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_200a151b40d5e22321d83b8c9908d579
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fdcecc92913de53f59fc5c58974787b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce59e100f0afdfe99fdd8e12a3425491
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0fb079a2d70ba30c153b8b305a28bb4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0057f82f81ea23c9e238ac07d313459
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f0e4e6548c2589750a47759fe306df2 |
| publicationDate |
2013-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I393178-B |
| titleOfInvention |
Semiconductor substrate processing composition |
| priorityDate |
2005-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |