Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31612 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31633 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02315 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3148 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3185 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
filingDate |
2007-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2013-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb8b4e0ce8a42ee7ee3f3e656650aaae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66e4e2f4316f1ec6aa58a29a8b8240d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a5f7e88b75753fce5743b8a07175da4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7535312ace812d59831a879fcfec0323 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f5ccb1767df3728ec015a38ed394e5c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3841c87c920449d2fe6d182f5884166f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25d0b61a467bbffe39ff707047653338 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77e8ba54cbf4714ad104430f406bafc5 |
publicationDate |
2013-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-I391996-B |
titleOfInvention |
Method for reducing total defects of plasma-assisted chemical vapor deposition film |
priorityDate |
2006-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |