| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_000e2b4b4468f107c25e72c767d27597
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e2e0452e5988047f97a14009657bf509 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02363
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0236 |
| filingDate |
2005-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3dbc50bd8523f2e50c3022c9d0b75f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a9974f9597043aad930384e79122079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3e88f9a16f4c63d9f4eaadd2441a096 |
| publicationDate |
2013-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I390615-B |
| titleOfInvention |
Method for manufacturing semiconductor substrate, semiconductor substrate for solar energy, and etching solution |
| priorityDate |
2004-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |