| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02G9-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02G9-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2004-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c92f182ae0351a00024444462b305b3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbae801b8e333f2daaefcc633834ad7f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a10e74afd24c6b339cc178049178970
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46a5a1b318ffb59a69ab94f09b9fab7e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc754cbeee80f87557d30cb607f07e60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce1a6a9b1409b5ba70a737bf85e4dfca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d198b212800ec440a1be3a43bb8fd511 |
| publicationDate |
2013-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I386445-B |
| titleOfInvention |
Etching composition and preparation method thereof, method of etching oxide film, and method of manufacturing semiconductor device |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I401666-B |
| priorityDate |
2003-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |