| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6704
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B6-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 |
| filingDate |
2005-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fedc43422add59d2180f5602390557f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_966438b101a4216a7bddab87c96de4ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cb805a58bba6d470c885dcab58f5b54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c6e9bbc62232b6f1f7526fd45dd8924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35d27e2da0ed103cb80d78556b8704eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d4efb466fa2c02b8be3289f70ce1520
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44beb4e9bb8320caa3e0e6985c7dfe19 |
| publicationDate |
2012-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I376275-B |
| titleOfInvention |
Wet cleaning of electrostatic chucks |
| priorityDate |
2004-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |