| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-42 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-42 |
| filingDate |
2005-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf60ec226a2b16d74a0d5c59bfebf4bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78450bdcb4a39e3cf81db1d15e3252b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca30ccafadd4dc93bbe547f07eb5d89c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_579aa9af7b3e10b769ba091ef6bdddc7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28e461e026535184df49b7e688e11c8c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_420eea136560344e42256db30bb2aa54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6c4753d7b0b2fdc5cb57415e7849cd9 |
| publicationDate |
2012-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I376000-B |
| titleOfInvention |
Methods and apapratus for inspecting contact openings in a plasma processing system |
| priorityDate |
2004-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |