| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_63415f052d55f580530dfc12b7adad17 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0758
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate |
2008-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12b0073c754e74a6a11629512d3a0e7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6880e672225a97ec638d1c495aa6869f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99cb36dee36748f5126220c8ac91c035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8462381dd7352c778ab6a9432157334 |
| publicationDate |
2012-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I369585-B |
| titleOfInvention |
Silicon-containing composition for fine pattern formation and method for fine pattern formation using the same |
| priorityDate |
2007-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |