| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_515262dca048e434990a1670088a10fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_20d3042eb4ea7c9afd525aa89373349d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-952 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2005-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02d2d18db8da529cab010f224172efee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35e6fceeeee49a26e1d7ecd1b09b4aaf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9058d47f524722a0c00a0e936bb0a532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65c0a73d2d04bb8e740d852a8eabaac5 |
| publicationDate |
2012-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I362566-B |
| titleOfInvention |
Composition for antireflection coating and pattern forming method |
| priorityDate |
2004-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |