Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3185 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-5096 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
filingDate |
2005-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2012-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea2f4c8b008f38b35cae5d7f6c399222 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34a05d69c118d02aff58d82aba2ce4b4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9ac8dd13e087f477d9aff3be0c36b19 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1eea7012f431a82da4ea4b64e4ac2dc7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_621b2912540f8fca3cc01777dcbefbac http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffbe8f107a011d8c565d5c95c033033b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e15c5959c654d9592b2eced0ddbca933 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac403b38b142e2ce65d41a9ae257430b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4c10c27f5b5f4385b641d06102af218 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a0ebc90a47fac88ecdbe610b0cd34c5 |
publicationDate |
2012-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-I360180-B |
titleOfInvention |
Method for forming stressed materials on a substra |
priorityDate |
2004-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |