| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc905cbef116a1ec61d12125af9427f3 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2008-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a186676efaafd0a5ec087f25f14b5eca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5dce4ca63f67d6cd7f14faca2a0a6ed6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_816c3b19200481f7384cf6d3968cc0a3 |
| publicationDate |
2012-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I358538-B |
| titleOfInvention |
Apparatus for measuring defects in semiconductor w |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11507020-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9971229-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9389483-B2 |
| priorityDate |
2008-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |