| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_76c52b1ca1318005d13fc2fdf3c26a23 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-5957 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01T1-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-20091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-201 |
| filingDate |
2004-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86b1658af1e9f13fa0158fc1c64047f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e90535d85e2cb13888bcb19c89b5ebc |
| publicationDate |
2011-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I345055-B |
| titleOfInvention |
Method and apparatus for inspection,and cluster tool and apparatus for producing microelectronic devices |
| priorityDate |
2002-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |