| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2006-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d0070f5a9361d40dac292c0045992ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bbf9cbf17cad788274153b9ab31f04c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51f8f4129cad146e27dd7321b078fbfb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12a6c8253666dddbe4034ed3bf4e4321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc3d03b244f6aa9198c362cdcde5349a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92f938c9371b233ccb87526d800d2bd8 |
| publicationDate |
2011-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I343945-B |
| titleOfInvention |
Slurry for metal polishing and polishing method of polished film |
| priorityDate |
2005-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |