| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-72 |
| filingDate |
2004-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42586d7f65de5a462fb51f4de509e017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81239098cb3457f7277fbdf891298c04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d19050deff21afcfd45cdb4127a3a7cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_310f25f8212c233c7e4c9696ace3a1ec |
| publicationDate |
2011-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I337102-B |
| titleOfInvention |
Method for the removal of airborne molecular contaminants using oxygen and/or water gas mixtures |
| priorityDate |
2003-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |