| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aea8583efc4aa4e2a9706d789804d37b |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2007-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9b1973d1c02259a78db148c2a192f28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f50834df5640d78268d1fb7f779e202c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a32236147cb098037db6432a7cf69c9f |
| publicationDate |
2011-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I336111-B |
| titleOfInvention |
Method for in-situ repairing plasma damage on substrate and method for fabricating transistor device |
| priorityDate |
2007-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |