http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I335620-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate | 2006-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_671f68f4d8b107b1b544602db4747e6e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d82289721b44a3d67bcfc707dcc851a5 |
| publicationDate | 2011-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I335620-B |
| titleOfInvention | Wafer edge cleaning process |
| priorityDate | 2005-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.