Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
filingDate |
2006-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2011-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d072f1629ca27adc6324af88e2d27d91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0404f734ae876eb23bfedabca2abc0c7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3459cb5cc8b4d592db3bdd04ae5cf7d2 |
publicationDate |
2011-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-I335494-B |
titleOfInvention |
Developing liquid composition, manufacturing method thereof and method for resist pattern |
priorityDate |
2005-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |