http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I334169-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e4c608a8531ea588aab7e23318e09a77 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 2006-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ae9aea3141bf5fb9147de4d7b45f024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f96d539895fe6be5fd7755e416c16a63 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a005422fabcfe51161f278420c5f5591 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ce9aeb3e688af426817ea58c27241db |
| publicationDate | 2010-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I334169-B |
| titleOfInvention | Cleaning solution using in semiconductor process |
| priorityDate | 2006-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 128.