| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7c5a4ae81822d214a07bf55ad61bd1cf |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3471
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3457
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2006-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86274b8fe93220c09ea1c19086be6c47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_514de71b0f9cec837dccdba951a4eccb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b195f8f56f8f7d87b3a431c7c0f2a40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fc7857be70a6ce664ea55e821dd5107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bf59f21eddd3f79ce1f4df20e73908a |
| publicationDate |
2010-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I334166-B |
| titleOfInvention |
Silicon dot forming method and silicon dot forming apparatus |
| priorityDate |
2005-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |