| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate |
2006-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04638492b38d5ec539bb8ee941dc6e8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_394ee5f052e049c64fa1cadbd032e3a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_485cdfad32ba3657fc6a6288eb041814 |
| publicationDate |
2010-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I332681-B |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I629088-B |
| priorityDate |
2006-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |