Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1089 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76844 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45542 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32633 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-5096 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
filingDate |
2006-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2010-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9fe49ea47c976a2c7c17308411066d6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e3be607f0d70f5824be01b3ea3e8373 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53a14477452c37ca7fe341f710daf62b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_531383e3f947d81639d3f284d5acb2bb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a230be721df3aab23c278515e4335a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93662981a921fa5757ba1e8e86a867d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08cc70664950b9323ac87a7c17336a8b |
publicationDate |
2010-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-I331770-B |
titleOfInvention |
Apparatus for plasma-enhanced atomic layer deposition |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I473903-B |
priorityDate |
2005-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |