| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2004-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c38746563dcdc6eaace72b142443bd17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b5ba55a9ab2c6f367a425a3245415a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bb8f7b866e63bd1e1188b3b4e437e7a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe2e139ff7d0de62f8f6287c050bec0c |
| publicationDate |
2010-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I329668-B |
| titleOfInvention |
High selectivity cmp slurry composition for sti process in semiconductor manufacture |
| priorityDate |
2004-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |