http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I328860-B
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3c754156d9ab873a2efe5a3990dbf627 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate | 2007-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2010-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af331d1ae1c9d9c1557733cce304741e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_231951c2d6c87fe2bbf43baa3a598601 |
publicationDate | 2010-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-I328860-B |
titleOfInvention | Metal line and method for forming the metal line |
priorityDate | 2007-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.